| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced pressure drying apparatus preventing bubbles, mist and solid content produced in a reduced pressure drying container, from being delivered to the pressure reducing device side. SOLUTION: This reduced pressure drying apparatus is provided with the reduced pressure drying container in which a material to be dried is filled and dried under reduced pressure, and an exhaust line connected to the pressure reducing device for suction-exhausting an atmosphere inside the reduced pressure drying container. A trap for preventing the bubbles and mist produced in the reduced pressure drying container during drying under reduced pressure, from being discharged to the pressure reducing device is provided at an intermediate part of the exhaust line. COPYRIGHT: (C)2005,JPO&NCIPI
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