| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which requires no reversal of a base material, makes a coating rate constant regardless of the property of a coating liquid and gives a target coating thickness. SOLUTION: The coating device is employed for applying a coating liquid to the upper surface of a base material W on the upper surface of a suction table 12. The coating liquid is fed from the capillary gap of a coating nozzle 14 to contact the upper surface of the base material W, and the coating liquid is applied to give a coating thickness d by capillary phenomena and syphon phenomena while moving the suction table 12, and the coating nozzle 14 is lifted and the liquid is separated by the syphon phenomena after the coating is completed. COPYRIGHT: (C)2005,JPO&NCIPI
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