OPTICAL CHARACTERIZATION OF SURFACES AND PLATES

摘要

Techniques and systems for processing optical transmission of a plate (401) in an optical shearing interferometer (450A, 450B) to measure the plate. Both optical reflection and optical transmission of the plate may be processed by optical shearing interferometers (451A, 452A 451B, 452B) to obtain measurements of the plate, including surface information of at least one reflective surface, the wedge slopes, and variation in the refractive index of the plate, net optical distortions through plate assembly.