发明名称 Material zur Gasphasenabscheidung
摘要 <p>Objects of the invention are to provide a novel vapor deposition material for coating from which a thermal barrier coating film excellent in heat resistance and thermal shock resistance can be satisfactorily formed even by the EB-PVD method, and to provide a method of vapor deposition in which the vapor deposition material is used. The vapor deposition material comprises a zirconia sintered body containing a stabilizer, wherein the sintered body has a content of monoclinic crystals of from 25 to 90% and has a maximum thermal expansion ratio not exceeding 6x10<-3> based on room temperature when heated in the temperature range of from room temperature to 1,200 DEG C. This zirconia sintered body preferably has a tapped density of from 3.0 to 5.5 g/cm<3>, a porosity of from 5 to 50%, and a mode size of pores of from 0.3 to 10 mu m, and in the sintered body the volume of pores of from 0.1 to 10 mu m preferably accounts for at least 90% of the total pore volume. The vapor deposition method uses this vapor deposition material. <IMAGE></p>
申请公布号 DE60012625(T2) 申请公布日期 2005.07.28
申请号 DE2000612625T 申请日期 2000.05.17
申请人 TOSOH CORP., SHINNANYO 发明人 KONDO, SATOSHI;KUBOTA, YOSHITAKA;HARADA, YOSHINORI
分类号 C04B35/48;C04B35/486;C23C14/08;C23C14/24;(IPC1-7):C23C14/08 主分类号 C04B35/48
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