| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron source device having a cover made of a non-magnetic material and with such a shape as to maximize the size of an aperture for a material which is placed in a crucible, is heated/melted by irradiation with electron beams and vapor-deposits on a substrate arranged so as to face with the crucible, installed on a pole piece for applying a magnetic field so as to link with the electron beams, when the electron beams emitted from the electron source of an electronic apparatus irradiates a sample in the crucible while being rotated by 180 degrees or more. SOLUTION: The electron source device comprises: the pole piece made of a magnetic material, which is provided in the middle of a path of the electron beams emitted from the electron source toward the crucible, and rotates them 180 degrees or more as described above by applying the magnetic field so as to link with the electron beams; and the cover made of a non-magnetic material, which has such a shape as to maximize the size of the aperture for the material that has been heated in a crucible by irradiation with electron beams, and that directs to a substrate arranged so as to face with the crucible, and which covers the pole piece. COPYRIGHT: (C)2005,JPO&NCIPI
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