发明名称 Non-volatile semiconductor memory device and method of manufacturing the same
摘要 A non-volatile semiconductor memory device includes a semiconductor substrate, a memory cell array formed on the semiconductor substrate, and including a first gate insulator having a first thickness. The device further includes a high-voltage transistor circuit formed on the semiconductor substrate, and including a second gate insulator having a second thickness greater than the first thickness, and a peripheral circuit formed on the semiconductor substrate, and including the second gate insulator.
申请公布号 US2005164427(A1) 申请公布日期 2005.07.28
申请号 US20050083930 申请日期 2005.03.21
申请人 KAMIYA EIJI 发明人 KAMIYA EIJI
分类号 H01L21/8234;H01L21/8247;H01L27/088;H01L27/10;H01L27/105;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/44 主分类号 H01L21/8234
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