发明名称 OPTICAL COMPONENTS AND PRODUCTION THEROF
摘要 <p>The invention relates to a method for production of an operation system for an optical component, comprising the engraving of a first face of a component to form blocks thereon, the engraving of a second face of the component to release a membrane of the same material as the blocks and the production of operating means of the blocks and the membrane.</p>
申请公布号 WO2005069057(A1) 申请公布日期 2005.07.28
申请号 WO2004FR50758 申请日期 2004.12.23
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;DIVOUX, CLAIRE;VAUDAINE, MARIE-HELENE;ENOT, THIERRY 发明人 DIVOUX, CLAIRE;VAUDAINE, MARIE-HELENE;ENOT, THIERRY
分类号 B81B3/00;B81C1/00;G02B26/08;(IPC1-7):G02B26/08 主分类号 B81B3/00
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