SINGLE-CRYSTAL-SILICON 3D MICROMIRROR,申请号SG20040006813-传众专利搜索

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发明名称	SINGLE-CRYSTAL-SILICON 3D MICROMIRROR
摘要
申请公布号	SG112929(A1)	申请公布日期	2005.07.28
申请号	SG20040006813	申请日期	2004.11.22
申请人	AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH	发明人	GAN CHIH KIONG TERENCE;AJAY AGARWAL;JANAK SINGH;ZHANG XIAOLIN
分类号	G02B26/08;H01L21/00;H01L21/302	主分类号	G02B26/08
代理机构		代理人
主权项
地址

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