| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved technology for measuring small dimensions quickly and accurately by using a probe microscope. SOLUTION: By combining direct measurement of each data point of concerned structure characteristics, scanning based on displacement, track of oblique approach of a probe needle tip and detection of force in side direction, accuracy and speed of probe measurement are improved. The direct measurement of space position in each data point of concerned structure characteristics minimizes system drift and quicken the determination of small dimensions even with raising measurement accuracy. By scanning based on the displacement, the accuracy and throughput are more improved. By using the track of oblique approach of the probe needle tip, sensitivity to flexible contact is improved. By detecting the force in side direction, the throughput is improved, suppressing damage on needle tip and/or sample surface at the same time. COPYRIGHT: (C)2005,JPO&NCIPI |
