METHOD FOR MANUFACTURING QUANTUM WIRE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a quantum wire easily at low cost. SOLUTION: Polysilane is dissolved into a solvent to form a polysilane thin film 104 by a method of spin coating. Then, the polysilane thin film 104 is subjected to dry etching, thus forming a polysilane wire 105 since the undercut section of resist 103 becomes a mask. COPYRIGHT: (C)2005,JPO&NCIPI