| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of designing an optical modulation element for manufacturing inexpensively a highly robust optical modulation element. SOLUTION: The method is to design the optical modulation element of a microelectromechanical type, which has a fixed part 13, a movable part (optical modulation part 15) arranged freely movably to and from the fixed part 13, an electrode and a half-mirror 23 and 31 which are respectively provided on the fixed part 13 and the movable part, and in which optical modulation element the movable part is dislocated by applying a driving voltage between the electrodes, the optical modulation is performed for light made incident at a predetermined angle range depending on a separated distance of the half mirrors 23 and 31 and interference characteristic of light according to the light wavelength, the reflectance R of the half mirrors 23 and 31 is set in the range of 0.88≤R≤0.92, and the radiation luminance distribution of the light which is made incident to the optical modulation element is set in the ranges from 0 to 20 deg and from 0 to 30 deg. COPYRIGHT: (C)2005,JPO&NCIPI
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