REFERENCE SAMPLE FOR ELEMENT MAPPING OF TRANSMISSION ELECTRON MICROSCOPE AND ELEMENT MAPPING METHOD FOR TRANSMISSION ELECTRON MICROSCOPE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a reference sample for element mapping of a transmission electron microscope, capable of being used for compensating results of SEM, EDS and EELS mappings of a multilayer nano thin film and capable of optimizing mapping conditions, and to provide an element mapping method for the transmission electron microscope using the reference sample. SOLUTION: The reference sample is composed of a substrate 10; a first crystalline thin film 11 which includes heavy atoms and is formed on the substrate 10; a first amorphous thin film 12 which includes oxide or nitride containing light atoms and is formed on the first crystalline thin film 11 so that its film thickness is 1 to 5 nm; and second crystalline thin film 11' which includes heavy atoms and is formed on the first amorphous thin film 12. COPYRIGHT: (C)2005,JPO&NCIPI