Pulse electric current generating apparatus used in microchip manufacture, has capacitor bank comprised of two capacitors, for producing high voltage for discharge

摘要

A reversal charging circuit (2) includes a capacitor bank comprised of two capacitors (C1,C2) connected in parallel with a direct current voltage source (1). The reversal recharge of capacitor (C1) is performed by triggering a switch, based on values of a saturable inductor (Lvi) and capacitor (C1), and a high voltage for discharge, to be supplied to a gas discharge chamber (4), is obtained from the capacitor bank.