| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump which can pressure-feed by a small force feed amount, in particular, whose structural dimension of diaphragm enables simple and inexpensive manufacture and location adjustment of component parts. SOLUTION: The diaphragm pump 1 has ring-shaped working chambers 6 and ring-shaped diaphragms 3. Outer peripheral ranges 12 are tightened and fixed to inner edge ranges 13, and both tightening and fixing portions are immobilized mutually and relatively. Drive elements 8 are connected with a pump drive device to act between the both tightening and fixing portions for displace the diaphragm. The drive element is formed in a sleeve shape or a ring shape having a diameter approximately corresponding to the working chamber 6 on a side facing the diaphragm. A ring-shaped end face of the drive element 8 acts on a side facing the pump drive device of a ring diaphragm in a direction orthogonal to a diaphragm flat surface. COPYRIGHT: (C)2005,JPO&NCIPI |
