发明名称 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method
摘要 The invention relates to a method of cleaning the surface of a material ( 4 ) that is coated with an organic substance. The inventive method is characterised in that it comprises the following steps, consisting in: introducing the material ( 4 ) into a treatment chamber ( 2 ), having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode ( 5 a, 5 b , 5 c, 5 d, 5 e, 5 f, 5 g) in order to break down the organic substance under the action of the free radicals O thus produced. The invention also relates to an installation ( 1 ) that is used to carry out said method.
申请公布号 US2005161433(A1) 申请公布日期 2005.07.28
申请号 US20050504596 申请日期 2005.04.08
申请人 SILBERBERG ERIC;MICHEL ERIC;RENIERS FRANCOIS;BUESS-HERMAN CLAUDINE 发明人 SILBERBERG ERIC;MICHEL ERIC;RENIERS FRANCOIS;BUESS-HERMAN CLAUDINE
分类号 H05H1/24;B08B7/00;C23G5/00;(IPC1-7):B08B6/00;C23F1/00 主分类号 H05H1/24
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