HIGH PURITY SILICON CARBIDE ARTICLES AND METHODS

摘要

A high purity ceramic article having a typical pore size of at least about 15 µm and an active impurity concentration of less than about 400 ppm can be prepared by molding ceramic powder, sintering to vaporize any active impurity components, washing to dissolve any remaining active impurity components with an acid solution, and oxidizing to remove any residual active impurity components.