| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a glass ceramic substrate provided with a ferrite layer having high magnetic permeability and having constitution in which the inductance of a coil conductor built in the ferrite layer is high and stable, and to provide a method for manufacturing the glass ceramic substrate. <P>SOLUTION: The ferrite layer 2 baked simultaneously with glass ceramic insulating layers 6 by microwaves including a coil conductor buried in its inside and having the same size as the glass ceramic insulating layers 6 are formed on the inner layer of an insulating substrate 1. A plurality of glass ceramic insulating layers 6 are laminated on the substrate 1 through an intervention layer comprising at least one sort of an insulating layer 4 and a baked metallic layer 5, having thickness of ≥10μm and formed between the glass ceramic insulating layers 6 and the ferrite layer 2. The thermal expansion coefficient of the ferrite layer 2 is higher than that of glass and filler of the glass ceramic insulating layer 6, the insulating layer 4 contains glass having a thermal expansion coefficient higher than that of the glass ceramic insulating layer 6 and the same ferrite as that of the ferrite layer 2 and the baked metallic layer 5 contains prescribed metal and glass. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
