| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting optical device of a parallel light shedding type that can acquire flux of light with a cross-section of a desired size at the portal of the exposure device main unit, even if the leading distance changes in accordance with a layout. SOLUTION: This lighting optical device is equipped with a light conversion means (2) that converts light ejected from an optical source(1) at a maximum angle to the optical axis (AX) to light nearly parallel to the axis in order to obtain parallel flux of light having a cross-section of a desired size in the predetermined surface (7a). The light conversion means is equipped with a primary conversion optical system having a finite focal length corresponding to a primary angle in order to convert light ejected from optical source in a primary surface at a maximum primary angle to light nearly parallel to the optical axis, and a secondary conversion optical system having a finite focal length corresponding to a secondary angle in order to convert light ejected from optical source at a maximum secondary angle in a secondary surface orthogonal to the primary surface to light nearly parallel to the optical axis. COPYRIGHT: (C)2005,JPO&NCIPI
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