| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of excellently and highly accurately keeping the flatness of a wafer W as an object to be sucked, and holding the object even if it is of an insulator such as liquid crystal glass by a high attraction force. SOLUTION: The electrostatic chuck has an electrode on a plate-shaped ceramic structure and an insulating layer taking as a chief ingredient polyimide to cover the electrode, the upper surface of which forms a placement surface for a wafer. In the electrostatic chuck, the Young's modulus of the plate-shaped ceramic structure is assumed to be≥350 GPa. COPYRIGHT: (C)2005,JPO&NCIPI |
