GLASS FOR EXCIMER LAMP, DISCHARGE CONTAINER FOR EXCIMER LAMP, AND EXCIMER LAMP

摘要

PROBLEM TO BE SOLVED: To provide an excimer lamp in which the optical output is not deteriorated with the passage of lighting time and generation of cracks is suppressed and does not have light-out. SOLUTION: This is a glass for discharge container of an excimer lamp using a wavelength of 200 nm or less and is an excimer lamp glass made of fluorine-doped silica glass. This is a discharge container for excimer lamp using a wavelength of 200 nm or less and is made of the above excimer lamp glass. This is the excimer lamp in which a discharge gas for forming excimer molecules by dielectric barrier discharge is filled in the discharge container 1 and light of a wavelength of 200 nm or less emitted from the excimer molecules is extracted, and as a discharge container, the above discharge container for excimer lamp is used. COPYRIGHT: (C)2005,JPO&NCIPI