| 摘要 |
A disclosed optical deflection element includes a magnesia spinel film 22 , a lower electrode 23 , a lower cladding layer 24 , a core layer 25 , and an upper cladding layer 26 , which are sequentially stacked formed on a silicon single crystal substrate 21 . The magnesia spinel film 22 , the lower electrode 23 , a PLZT film acting as the lower cladding layer 24 , and a PZT film acting as the core layer 25 are epitaxially grown on respective underlying layers thereof. Because of a voltage applied between the lower electrode 23 and the upper electrode 26 , refractive index variable regions 25 A, 24 A, in which the refractive index varies, are formed due to the electro-optical effect. Light incident into the core layer 25 is deflected at the interface between the core layer 25 and the refractive index variable regions 25 A, 24 A to the inner side relative to the surface of the core layer 25.
|
