| 发明名称 |
ULTRA-SHORT WAVELENGTH X-RAY SYSTEM |
| 摘要 |
<p>A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.</p> |
| 申请公布号 |
WO2005069451(A1) |
申请公布日期 |
2005.07.28 |
| 申请号 |
WO2004US00252 |
申请日期 |
2004.01.07 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF MICHIGAN;UMSTADTER, DONALD;HE, FEI;LAU, Y., Y. |
发明人 |
UMSTADTER, DONALD;HE, FEI;LAU, Y., Y. |
| 分类号 |
H01S3/00;H01S3/09;H01S3/094;H01S3/0959;H01S3/30;(IPC1-7):H01S3/00 |
主分类号 |
H01S3/00 |
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