| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that the conventional piezoelectric element constantly requires voltage to be applied to maintain an electric potential volume, and thus, it could not maintain its position unless voltage is steadily controlled for an long period of time. <P>SOLUTION: The piezoelectric thin-film device has a first electrode 1, a second electrode 2, and a piezoelectric thin-film element 10 sandwiched between the first electrode 1 and the second electrode 2 having a polarized vector in a film thickness direction, and composed by a piezoelectric thin film 3 whose polarized vector is inverted if voltage higher than a specified value is applied via the first electrode 1 and the second electrode 2, and a power circuit 4 that supplies voltage that inverts the polarized vector, wherein the piezoelectric thin film 3 has different lattice parameters based on a polarized vector direction, and maintains different displacement positions in response to the polarized vector even when voltage is not applied. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
