| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of forming a transparent electroconductive film, having satisfactory optical properties and electrical properties and having excellent mechanical resistance on a plastic film base material, highly safely in a high productivity, and to provide a transparent electroconductive film and an article having the transparent electroconductive film. <P>SOLUTION: In the method of forming the transparent electroconductive film under atmospheric pressure or under the pressure near the atmospheric pressure, reactive gas and discharge gas are introduced into a discharge space between electrodes, a high frequency electric field is applied to the space between the electrodes so as to be a plasma state, and, in the discharge space, a base material is exposed to the reactive gas in the plasma state to form a transparent electroconductive film on the base material, the reactive gas is a gaseous mixture comprising inorganic gas having at least one oxygen atom in the molecule and an organic metal compound, and the discharge gas is nitrogen. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
