| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to form an exact defect signal not only to a dark defect but also to a bright defect. SOLUTION: A peak hold signal is generated from an RF signal. A peak signal is generated by comparing a peak side level shift signal which is generated by lowering a signal level of an intermediate peak hold signal which holds a peak of the RF signal with the peak hold signal. A bottom signal is generated by comparing a bottom side level shift signal which is generated by raising the signal level of intermediate bottom hold signal which holds a bottom of the RF signal with a peak hold signal. A delay peak signal which is a delayed trailing edge of the peak signal is generated, and a delay bottom signal which is a delayed trailing edge of the bottom signal is generated. The defect signal is generated by shaping a waveform of the bottom signal based on a delay peak signal, it is decided to generate the defect signal by shaping the waveform of the peak signal based on the delay bottom signal. COPYRIGHT: (C)2005,JPO&NCIPI
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