| 摘要 |
PROBLEM TO BE SOLVED: To provide a protective film large in thickness and high in reliability as a protective film for an organic EL device and other devices. SOLUTION: The protective film for a thin film device formed on an upper part of a substrate comprises at least a first layer as a hydrogen diffusion protecting layer formed on the side of the thin film device, and a second layer formed by a CVD method or sputtering to which hydrogen is introduced in depositing the film. COPYRIGHT: (C)2005,JPO&NCIPI
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