| 摘要 |
PROBLEM TO BE SOLVED: To provide a mapping type electron microscope capable of improving resolution by lessening the occurrence of a blur by the coulomb effect. SOLUTION: The shape of a lighting beam 1 at a crossover position of an objective electro-optical system is a doughnut-like shape (bracelet-like shape), and generated electrons 2' pass through a hole part of the doughnut-like shape. Therefore, the coulomb effect between the lighting beam 1 and the generated electrons 2' can be small, so that the blur of an image can be made small. COPYRIGHT: (C)2005,JPO&NCIPI
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