| 发明名称 |
ELECTROSTATIC MEMS COMPONENTS PERMITTING A LARGE VERTICAL DISPLACEMENT |
| 摘要 |
<p>The invention relates to an electrostatic operating device, comprising a flexible electrode (30), with a first and a second end, at least one part of said electrode being mobile with relation to a substrate, two electrodes (32, 34), fixed with relation to the substrate (22) and means (18, 28), forming two pivots for the flexible electrode, arranged between the two ends of the flexible electrode.</p> |
| 申请公布号 |
WO2005069473(A1) |
申请公布日期 |
2005.07.28 |
| 申请号 |
WO2004FR50759 |
申请日期 |
2004.12.23 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;CHARTON, JULIEN;DIVOUX, CLAIRE |
发明人 |
CHARTON, JULIEN;DIVOUX, CLAIRE |
| 分类号 |
H02N1/00;(IPC1-7):H02N1/00 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
