PATTERN TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To improve the resolution of an exposure pattern without redesigning an optical control element and lens relating to a pattern transfer method. SOLUTION: Transfer data 1 are inputted to the optical control element and the transfer pattern consisting of effective pixel regions 2 in a two-dimensional array form formed by the optical control element is projected onto a substrate. At the time of the pattern transfer method using a pattern projector, the substrate and the pattern projector are relatively moved and the sequential exposure is carried out n2times by shifting the transfer data 1 by as much as 1/n spacing of the length on the side of the effective pixel region 2 constituting the transfer data 1 relating to the one transfer pattern 3 when n is defined as an integer. COPYRIGHT: (C)2005,JPO&NCIPI