Process for the purification of NF3

摘要

This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF₃) stream containing unreacted F₂, HF, and nitrogen oxides from an NF₃ reactor wherein the F₂, and HF are removed and then the nitrogen oxides removed by adsorption. The improvement in the process resides in selectively removing the F₂ from said NF₃ stream without generating oxygen difluoride, removing HF and then removing said nitrogen oxides by adsorption. Further purification can be effected as desired.