发明名称 Method for manufacturing of a vertical light emitting device structure
摘要 Disclosed are a vertical GaN based light-emitting device (LED) structure and the manufacturing method thereof. In the structure and the corresponding method, a substrate unit having a mask is used to form a multi-layer epitaxial structure and the substrate and the multi-layer epitaxial structure are separated at the mask. After the multi-layer epitaxial structure is extracted, a metal reflector may be disposed thereunder. Next, a conductive substrate is bonded to the metal reflector. Next, an upper surface of the multi-layer structure is disposed with a p-electrode and a bottom side of the conductive substrate with an n-electrode whereby an vertical LED structure is formed.
申请公布号 US2005161699(A1) 申请公布日期 2005.07.28
申请号 US20050082809 申请日期 2005.03.18
申请人 SUPERNOVA OPTOELECTRONICS CORP. 发明人 HON SCHANG-JING
分类号 H01L33/00;H01L33/06;H01L33/10;H01L33/12;H01L33/32;H01L33/40;H01L33/42;(IPC1-7):H01L33/00 主分类号 H01L33/00
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