A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.
申请公布号
WO2005069055(A2)
申请公布日期
2005.07.28
申请号
WO2005EP00262
申请日期
2005.01.13
申请人
CARL ZEISS SMT AG;SHAFER, DAVID;ULRICH, WILHELM;DODOC, AURELIAN;VON BUENAU, RUDOLF;MANN, HANS-JUERGEN;EPPLE, ALEXANDER
发明人
SHAFER, DAVID;ULRICH, WILHELM;DODOC, AURELIAN;VON BUENAU, RUDOLF;MANN, HANS-JUERGEN;EPPLE, ALEXANDER