CAPACITIVE STRAIN SENSORS

摘要

A capacitive strain sensor comprising first and second anchors and first, second and third finger sets. The first finger set has a plurality of first fingers extending in a first direction. The second finger set has a plurality of second fingers extending in a second direction. The third finger set has a first plurality of third fingers overlapping the first fingers and a second plurality of third fingers overlapping the second fingers. The first, second and third finger sets are associated with the first and second anchors such that movement of the first anchor causes the third finger set to move relative to the first and second finger sets such that a differential capacitrance is detected between the finger sets. The finger sets may be provided with buckled beams to provide a mechanical advantage that improves accuracy and sensitivity of the strain sensor.