| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency power supply apparatus using an E-class amplifier which is small in loss with a switching element even if it is not in matching state due to generation of reflected wave power. <P>SOLUTION: This high-frequency power supply apparatus is equipped with: a power detector which detects progressive wave power and reflected power wave; a load impedance calculating part which calculates load impedance, based on the output of the power detector; a correspondence memory which predetermines and stores the correspondence between the load impedance and the duty cycle of a high-frequency signal; a duty cycle output part which outputs the duty cycle corresponding to the load impedance calculated in the load impedance calculating part, referring to the correspondence stored in the correspondence memory; an oscillator which outputs the high-frequency signal of this duty; and an amplifier which amplifies the output of the oscillator and outputs the progressive wave power of high frequency toward the load. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
