| 摘要 |
PROBLEM TO BE SOLVED: To improve a measuring system of a fine particle height, in a conventional method, the fine particle (9) has to be measured one by one, and it needs a time and a man-hour because one fine particle (9) is placed manually with a precision within a range which is possible taking a photograph of it by a microscope camera or the like. SOLUTION: This invention makes it possible to measure automatically each height of a plurality of the fine particles (9) by a combination of a control of the microscope camera (4) with a personal computer (8) and an imaging processing technology. COPYRIGHT: (C)2005,JPO&NCIPI
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