| 摘要 |
PROBLEM TO BE SOLVED: To provide a tandem device using an absolute type linear encoder of a long moving stroke. SOLUTION: This tandem device is provided with a first linear motor Ma, a second linear motor Mb, a moving member 22 having a first end part 22a and a second end part 22b, a first linear encoder La having the first absolute position detecting part 35a for detecting an absolute position of the first moving piece, and a first relative position detecting part 35i, a second linear encoder Lb having a second relative position detecting part 37i and a second absolute position detecting part 37a, a first position detecting means for generating a first position detection combination signal based on a second absolute position detection signal and the first relative position detection signal, and a second position detecting creation means for generating a second position detection combination signal based on a first absolute position detection signal and a second relative position detection signal. COPYRIGHT: (C)2005,JPO&NCIPI
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