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发明名称
Verfahren zum Abtrennen einer Vielzahl von Scheiben von einem Werkstück
摘要
申请公布号
DE10054165(B4)
申请公布日期
2005.07.28
申请号
DE20001054165
申请日期
2000.11.02
申请人
SILTRONIC AG
发明人
KAESER, MAXIMILIAN
分类号
B23D59/00;B28D5/00;B28D5/04;(IPC1-7):B23D57/00;B28D1/02;H01L21/304
主分类号
B23D59/00
代理机构
代理人
主权项
地址
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