| 发明名称 |
EVAPORATOR FOR SUBLIMABLE MATERIAL |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve an evaporator for use as a vacuum coating apparatus for, especially, a sheet, equipped with at least one container 3 for holding a material 4 to be evaporated and a heating apparatus comprising a radiation heater. <P>SOLUTION: The radiant heater is in the form of heating rods 5. The heating rods 5 are provided on the upper part of the container 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005200767(A) |
申请公布日期 |
2005.07.28 |
| 申请号 |
JP20050006628 |
申请日期 |
2005.01.13 |
| 申请人 |
APPLIED FILMS GMBH & CO KG |
发明人 |
KLEMM GUENTER;HERZOG JENS;LOTZ HANS-GEORG |
| 分类号 |
C23C14/26;C23C14/24;C23C14/28;(IPC1-7):C23C14/26 |
主分类号 |
C23C14/26 |
| 代理机构 |
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代理人 |
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