| 摘要 |
PROBLEM TO BE SOLVED: To provide a zone purification system extremely high in practicability and keeping a zone regarded as a purification region positively clean. SOLUTION: In this zone purification system, a space above a placing means 2 is made to be the zone Z of the purification region, and air A is blown to the zone Z. Blowoff ports 5 of the air A are provided with air blowoff means 6 densely provided with linear passages 7 having small diameters and parallel with one another. The air blowoff means 6 are constituted to blow air A obliquely toward the zone Z from both right and left sides of a part direct above the zone Z. COPYRIGHT: (C)2005,JPO&NCIPI |
