| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultra-small magnetic sensor of a simple structure and low electric power consumption, which is superior in mass productivity and is capable of digitizing with high sensitivity the external measured magnetic field, and various kinds of application devices which uses the sensor. SOLUTION: This resonance type magnetic sensor is formed with a diaphragm on a substrate, is provided with an excitation means for the diaphragm and a detection means for resonance frequency and is formed to arrange ferromagnetic substance thin films facing the diaphragm and the substrate via a space. The ferromagnetic substance thin film A formed in the diaphragm and the ferromagnetic substance thin film B formed in a substrate side are magnetized by the external measured magnetic field, the resonance frequency of the diaphragm is changed by the magnetic force acting between magnetic poles of the ferromagnetic substance thin film A and the ferromagnetic substance thin film B, and the external measured magnetic field is found from the change in the output, based on the change in the resonance frequency. COPYRIGHT: (C)2005,JPO&NCIPI
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