PROCESS FOR PRODUCTION OF FLUORINE-CONTAINING NORBORNENE DERIVATIVES

摘要

Manufacture of a fluorine-containing norbornene derivative having a fluorine-containing ketone structure comprises reacting a norbornene derivative and a fluoroalkylating agent. Manufacture of a fluorine-containing norbornene derivative having a fluorine-containing ketone structure of formula (II) comprises reacting a norbornene derivative of formula (I) and a fluoroalkylating agent which introduces Rf 1>to the X in (I). [Image] [Image] X : -(R 1>) n2-X 1>; X 1>-COOR 2>or -C(=O)X 2>; R 2>1-5C alkyl group; X 2>halogen atom; R 1>divalent organic group; n2 : 0 or 1; Y : H, F, Cl, 1-10C alkyl group or fluoroalkyl group optionally containing an ether bond; n : 0-5; m : 1-5; m + n1 : 6; Rf 1>1-10C fluoroalkyl group optionally containing an ether bond; and Z : -(R 1>) n2-C(=O)Rf 1>. Independent claims are also included for the following: (1) manufacture of a fluorine-containing norbornene derivative having a fluoroalcohol structure; (2) a norbornene derivative having a fluorine-containing ketone structure of formula (V); (3) norbornene derivatives having a fluoroalcohol structure; (4) a fluorine-containing polymer of number average molecular weight 500-1000000, of formula -(M1)-(M2)-(N)-; (5) a chemically-amplified photoresist composition including the polymer, photo-acid generating agent and solvent. [Image] [Image] [Image] Z 3>-C(=O)Rf 3>; Rf 3>1-10C fluoroalkyl group optionally containing an ether bond or of formula (VI) or (VII); M1 : unit derived from a norbornene derivative; M2 : unit derived from 2-3C ethylenic monomer; N : a copolymerizable monomer.