| 发明名称 |
Photoelectric encoder and method of manufacturing scales |
| 摘要 |
A first metal layer of tungsten is formed on a substrate in a scale. A second metal layer of chromium is formed on the first metal layer. The second metal layer is selectively removed with a mask of resist and an etching stopper of the first metal layer to form an optical grating. <IMAGE> |
| 申请公布号 |
EP1557701(A1) |
申请公布日期 |
2005.07.27 |
| 申请号 |
EP20050001563 |
申请日期 |
2005.01.26 |
| 申请人 |
MITUTOYO CORPORATION |
发明人 |
KANNO, TAKASHI;TOMINAGA, ATSUSHI;KOJIMA, KENICHI |
| 分类号 |
G01D5/347;G01D5/38;G02B5/18 |
主分类号 |
G01D5/347 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
