Parallel beam to beam uniformity correction

摘要

An electro-optical system for adjusting beam to beam intensity non-uniformity in a multi-beam scanning system is disclosed. The electro-optical system consists of NxM array of light beams and NxM array of photodetectors wherein optical means deflect the light beams onto the photodetector array. A circuit consisting of NxM array of programmable laser drivers for each light beam and having an NxM array of feedback loops is used to adjust an intensity of each beam through the programmable laser drivers wherein each programmable laser driver uses the photodetector array as a reference source to correct for beam to beam uniformity correction.