| 摘要 |
Power is supplied at an arbitrary position of a movable stage main body (3) or arbitrary timing by downsizing or removing a battery mounted on a movable stage main body, in a non-contact manner without using any electrical cable. In an alignment stage having a power reception coil (15) to which an AC magnetic field is supplied to obtain power in a non-contact manner, a plurality of power transmission coils (17) which supply power are buried in a base structure (1). An unit (19) for sequentially switching the power transmission coils in accordance with a position of the stage is provided. The power reception coils on the stage include a plurality of power transmission coils arranged to be phase-shifted from the power transmission coils. The frequency of the AC magnetic field is set at a resonance frequency determined by a load and the mutual inductance of the power transmission coils and power reception coils.
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