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发明名称
SOI substrate and method of manufacturing the same
摘要
申请公布号
KR100504163(B1)
申请公布日期
2005.07.27
申请号
KR20020055443
申请日期
2002.09.12
申请人
发明人
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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