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发明名称
PATTERNING METAL STACK LAYERS OF MAGNETIC SWITCHING DEVICE, UTILIZING A BILAYER METAL HARDMASK
摘要
申请公布号
EP1556864(A2)
申请公布日期
2005.07.27
申请号
EP20030809743
申请日期
2003.10.29
申请人
INFINEON TECHNOLOGIES AG;IBM INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
COSTRINI, GREG;HUMMEL, JOHN, P.;STOJAKOVIC, GEORGE;LOW, KIA-SENG
分类号
G11C11/16;H01F41/30;H01L43/12;(IPC1-7):G11C11/16
主分类号
G11C11/16
代理机构
代理人
主权项
地址
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