发明名称 HOMOGENOUS MONOCRYSTAL PRODUCING METHOD
摘要 FIELD: semiconductor electronics. ^ SUBSTANCE: method for producing monocrystals by crucible -free zone melting comprises steps of creating melt zone by induction heating of monocrystal; realizing electromagnetic agitation of melt and subjecting monocrystal in addition to action of ultrasonic oscillations with frequency 18 - 20 kHz and intensity 0.3 - 0.6 Wt/cm2. ^ EFFECT: enhanced uniformity of additive distribution along cross section of monocrystal, increased yield of high-quality devices. ^ 1 ex
申请公布号 RU2257428(C2) 申请公布日期 2005.07.27
申请号 RU20030131553 申请日期 2003.10.27
申请人 发明人 BYVALYJ V.A.
分类号 C30B13/20;C30B13/24;C30B13/26;C30B30/06 主分类号 C30B13/20
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