摘要 |
FIELD: semiconductor electronics. ^ SUBSTANCE: method for producing monocrystals by crucible -free zone melting comprises steps of creating melt zone by induction heating of monocrystal; realizing electromagnetic agitation of melt and subjecting monocrystal in addition to action of ultrasonic oscillations with frequency 18 - 20 kHz and intensity 0.3 - 0.6 Wt/cm2. ^ EFFECT: enhanced uniformity of additive distribution along cross section of monocrystal, increased yield of high-quality devices. ^ 1 ex |