发明名称 Adjustment of threshold voltages of selected NMOS and PMOS transistors using fewer masking steps
摘要 A method is provided for processing a semiconductor topography. In particular, a method is provided for decreasing the threshold voltage magnitude of a first transistor being formed within the substrate while simultaneously increasing the threshold voltage magnitude of a second transistor being formed within the substrate. In some embodiments, a width of the first transistor may be larger than a width of the second transistor. In addition or alternatively, the method may include performing a first implantation corresponding to a threshold voltage magnitude above a desired value for the first transistor. The method may further include performing a second implantation to simultaneously lower the threshold voltage magnitude of the first transistor and raise a threshold voltage magnitude of the second transistor. In some embodiments, the method may include introducing dopants of a first conductivity type into a first transistor channel dopant region and a second transistor channel dopant region simultaneously.
申请公布号 US6921948(B2) 申请公布日期 2005.07.26
申请号 US20030393032 申请日期 2003.03.20
申请人 CYPRESS SEMICONDUCTOR CORP. 发明人 WATT JEFFREY T.
分类号 H01L21/8238;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/8238
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