Flow detector with lead-throughs and method for its production

摘要

A flow detector comprises at least two housing parts with a semiconductor chip having an integrated flow sensor arranged between the housing parts. An opening is provided in one of the housing parts and at least one metal pin extends through the opening and forms an electrical lead-through. A hardened filler material is used for sealing the lead-through against the walls of the opening. This construction provides a well sealed cavity for the fluid to be measured and can be manufactured easily.