发明名称 |
Exhaust adaptor and method for chamber de-gassing |
摘要 |
An exhaust adaptor and method which includes attachment of an exhaust bellow or conduit to a process chamber to facilitate vacuum-induced evacuation of residual toxic gases from the chamber during cleaning and/or maintenance of the chamber. A throttle valve of the chamber is first removed from a throttle valve housing, and one end of the exhaust adaptor is next attached to the throttle valve housing. An exhaust bellow or conduit is attached to the opposite end of the adaptor. As a down flow of air is directed into the open chamber, vacuum pressure is induced in the chamber interior through the exhaust bellow or conduit, the adaptor and the valve housing, respectively. Air disturbances in the chamber interior are thus eliminated, and toxic residual gases generated in the chamber interior are therefore incapable of diffusing to the exterior of the chamber.
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申请公布号 |
US6920891(B2) |
申请公布日期 |
2005.07.26 |
申请号 |
US20020264519 |
申请日期 |
2002.10.05 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIN MU-TSANG;TSAI WIE-LIANG;LEE CHERNG-CHANG;LEE YEN-CHAN;LIU CHIA-HSIN |
分类号 |
F16K43/00;F16K51/02;(IPC1-7):F16K51/00;B08B9/08 |
主分类号 |
F16K43/00 |
代理机构 |
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代理人 |
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